When I try to start Process Monitor from SysInternals on some 64 bit windows 7 machines,the process fails to start. There is no error message. I double click and nothing happens. Other 64 bit windows 7 computers work fine. Any ideas?

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In have the same problem, and I can run Process Monitor in 32bit mode with command line option procmon.exe /Run32. However, it does not support capturing in this mode. – jirkamat Dec 30 '11 at 14:36
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Here is what I found. The 32 bit Procmon.exe contains the 64 bit exe inside it as a binary resource. When the 32 bit exe starts, it extracts the 64 bit version out to a hidden file called Procmon64.exe and then executes that. For some reason this process fails on some Windows 7 installs.

I managed to extract the 64 bit exe using Visual Studio 2010. 1. Open Visual Studio and open the Procmon.exe file using the File->Open->File... menu 2. In the resource tree, expand the "BINRES" node 3. Right-click on the 1308 node and select Export... 4. Name the exported resource Procmon-64.exe and save 5. Run the extracted exe

Don't name the extracted exe Procmon64.exe (no hyphen) because the 32 bit Procmon will try to delete it if it gets the chance.

If you don't have Visual Studio, use a windows executable resource extractor like ResourcesExtract - http://www.nirsoft.net/utils/resources_extract.html

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It is interesting that you found a work-around, but I would be far more interested in why you would even need to do that. – Zoredache Dec 14 '11 at 22:30
I'd like to find the root cause too, but debugging a native process without symbols is just not worth the effort. Especially one as integrated with the OS as Process Monitor. – Ryan Michela Dec 15 '11 at 4:13
Extracting the 64bit exe of ProcMon to standalone EXE and running this exe solves this problem for me! ProcMon is running fine. – jirkamat Dec 30 '11 at 15:30
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